English  |  正體中文  |  简体中文  |  Items with full text/Total items : 58017/91564 (63%)
Visitors : 13717615      Online Users : 55
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/7231

    Title: 精密輪磨加工矽晶圓表面性狀研究:(樹脂砂輪)鑽石輪磨與電解線上削銳輪磨之比較分析
    Other Titles: AStudy of the Surface Morphology and Sub-surface Characteristics of Single Crystal Silicon Generated by ELID-Grinding and (Resin-Bonded) Diamond Grinding
    Authors: 趙崇禮;簡錫新;馬廣仁
    Contributors: 淡江大學機械與機電工程學系
    Keywords: 輪磨;鑽石輪磨;晶圓表面;Grinding;Diamond grinding;Wafer surface
    Date: 2001
    Issue Date: 2009-03-16 16:00:28 (UTC+8)
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Research Paper

    Files in This Item:

    File Description SizeFormat
    902212E032007.pdf10686KbAdobe PDF717View/Open

    All items in 機構典藏 are protected by copyright, with all rights reserved.

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback