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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/71793


    Title: Wet Etching Mechanisms of ITO Films in Oxalic acid
    Authors: Tsai, Tzu-hsuan;Wu, Y. F.
    Contributors: 淡江大學化學工程與材料工程學系
    Date: 2006-06-01
    Issue Date: 2011-10-24 01:42:51 (UTC+8)
    Relation: Microelectronic Engineering 83, pp.536-541
    DOI: 10.1016/j.mee.2005.12.003
    Appears in Collections:[化學工程與材料工程學系暨研究所] 期刊論文

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