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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65452


    Title: 聚對二甲苯(parylene)微機電製程簡介
    Authors: 楊龍杰;林韋至;戴霆樘;林宏樺;黃恆凇
    Contributors: 淡江大學機械與機電工程學系
    Keywords: 聚對二甲苯;微機電製程;Parylene
    Date: 2004-06
    Issue Date: 2013-04-11 14:57:44 (UTC+8)
    Publisher: 臺南市:中華民國微系統暨奈米科技協會
    Relation: 微系統暨奈米科技協會會刊 11,頁26-42
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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