Fabrication and optical characteristics of silicon-based two-dimensional photonic crystal Mach–Zehnder interferometers

機構典藏 > College of Engineering > Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering > Journal Article > Item 987654321/65442

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Title:	Fabrication and optical characteristics of silicon-based two-dimensional photonic crystal Mach–Zehnder interferometers
Authors:	Liu, Cheng-Yang
Contributors:	淡江大學機械與機電工程學系
Keywords:	Photonic crystal;Mach–Zehnder interferometer;Electron beam lithography
Date:	2008-06
Issue Date:	2013-07-09 15:31:38 (UTC+8)
Publisher:	Amsterdam: Elsevier BV * North-Holland
Abstract:	Photonic crystals have many potential applications because of their ability to control light-wave propagation. We report on the fabrication and properties of quasi-two-dimensional photonic crystals with triangular lattices of dielectric rods in air. Rod-type photonic crystal structures were fabricated in silicon by electron beam lithography and dry-etching techniques. Mach–Zehnder interferometers were fabricated from two-dimensional photonic crystal waveguides. Transmission spectra were measured and device operation was shown to be in agreement with theoretical calculations. The interferometers can be used in the visible light region. Such an approach to photonic element systems should enable new applications for designing components in photonic integrated circuits.
Relation:	Physica E: Low-dimensional Systems and Nanostructures 40(8), pp.2800-2804
DOI:	10.1016/j.physe.2007.12.007
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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