The Application of V-Groove Solt-Array Method to the Piezoresistive Pressure Sensors

doi:10.1080/02533839.1997.9741837

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/65396

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题名:	The Application of V-Groove Solt-Array Method to the Piezoresistive Pressure Sensors
其它题名:	應用V型槽深度尺於壓阻式壓力計之製作
作者:	楊龍杰;Yang, Lung-jieh;江振家;Jian, C. C.;張培仁;Chang, P. Z.
贡献者:	淡江大學機械與機電工程學系
关键词:	piezoresistive;pressure sensor;V-groove
日期:	1997-03
上传时间:	2013-07-11 11:53:32 (UTC+8)
出版者:	Taipei : Chinese Institute of Chemical Engineers
摘要:	This paper describes a simple method to identify the membrane thickness of the piezoresistive pressure sensor by the so-called “slotarray” which has been made in advance on the wafers before sensor fabrication. Such a method can be applied as a substitute for other etch-stop techniques with micrometer-resolution. The results can also be used to check the uniformity of pressure sensors and give a guideline for further improvements in the batch process of silicon bulk micromachining. A series of pressure sensors with a chip size of 3×3×0.2mm3 were presented as the examples of the V-groove slot-array method. The finite element method (FEM) software ANSYS was accessed to predict the stress and resistance change of the sensors. The new pressure sensors with stiffened-bosses are tested and had a best sensitivity of 9.0 mV/atm/V and a non-linearity less than 1%.
關聯:	Journal of the Chinese Institute of Engineers=中國工程學刊 20(3), pp.335-347
DOI:	10.1080/02533839.1997.9741837
显示于类别:	[機械與機電工程學系暨研究所] 期刊論文

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