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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65396


    Title: The Application of V-Groove Solt-Array Method to the Piezoresistive Pressure Sensors
    Other Titles: 應用V型槽深度尺於壓阻式壓力計之製作
    Authors: 楊龍杰;Yang, Lung-jieh;江振家;Jian, C. C.;張培仁;Chang, P. Z.
    Contributors: 淡江大學機械與機電工程學系
    Keywords: piezoresistive;pressure sensor;V-groove
    Date: 1997-03
    Issue Date: 2013-07-11 11:53:32 (UTC+8)
    Publisher: Taipei : Chinese Institute of Chemical Engineers
    Abstract: This paper describes a simple method to identify the membrane thickness of the piezoresistive pressure sensor by the so-called “slotarray” which has been made in advance on the wafers before sensor fabrication. Such a method can be applied as a substitute for other etch-stop techniques with micrometer-resolution. The results can also be used to check the uniformity of pressure sensors and give a guideline for further improvements in the batch process of silicon bulk micromachining. A series of pressure sensors with a chip size of 3×3×0.2mm3 were presented as the examples of the V-groove slot-array method. The finite element method (FEM) software ANSYS was accessed to predict the stress and resistance change of the sensors. The new pressure sensors with stiffened-bosses are tested and had a best sensitivity of 9.0 mV/atm/V and a non-linearity less than 1%.
    Relation: Journal of the Chinese Institute of Engineers=中國工程學刊 20(3), pp.335-347
    DOI: 10.1080/02533839.1997.9741837
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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