English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 58323/91876 (63%)
造访人次 : 14082877      在线人数 : 60
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜寻范围 查询小技巧:
  • 您可在西文检索词汇前后加上"双引号",以获取较精准的检索结果
  • 若欲以作者姓名搜寻,建议至进阶搜寻限定作者字段,可获得较完整数据
  • 进阶搜寻


    jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65396


    题名: The Application of V-Groove Solt-Array Method to the Piezoresistive Pressure Sensors
    其它题名: 應用V型槽深度尺於壓阻式壓力計之製作
    作者: 楊龍杰;Yang, Lung-jieh;江振家;Jian, C. C.;張培仁;Chang, P. Z.
    贡献者: 淡江大學機械與機電工程學系
    关键词: piezoresistive;pressure sensor;V-groove
    日期: 1997-03
    上传时间: 2013-07-11 11:53:32 (UTC+8)
    出版者: Taipei : Chinese Institute of Chemical Engineers
    摘要: This paper describes a simple method to identify the membrane thickness of the piezoresistive pressure sensor by the so-called “slotarray” which has been made in advance on the wafers before sensor fabrication. Such a method can be applied as a substitute for other etch-stop techniques with micrometer-resolution. The results can also be used to check the uniformity of pressure sensors and give a guideline for further improvements in the batch process of silicon bulk micromachining. A series of pressure sensors with a chip size of 3×3×0.2mm3 were presented as the examples of the V-groove slot-array method. The finite element method (FEM) software ANSYS was accessed to predict the stress and resistance change of the sensors. The new pressure sensors with stiffened-bosses are tested and had a best sensitivity of 9.0 mV/atm/V and a non-linearity less than 1%.
    關聯: Journal of the Chinese Institute of Engineers=中國工程學刊 20(3), pp.335-347
    DOI: 10.1080/02533839.1997.9741837
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文

    文件中的档案:

    档案 大小格式浏览次数
    index.html0KbHTML231检视/开启

    在機構典藏中所有的数据项都受到原著作权保护.

    TAIR相关文章

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回馈