Surface morphology and sub-surface damaged layer of various glasses machined by 193 nm ArF excimer laser

機構典藏 > College of Engineering > Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering > Journal Article > Item 987654321/65392

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Title:	Surface morphology and sub-surface damaged layer of various glasses machined by 193 nm ArF excimer laser
Authors:	Chao, C.L.;Liao, Yunn-shiuan;Chen, Ying-Tung
Contributors:	淡江大學機械與機電工程學系
Date:	2005-04-01
Issue Date:	2011-10-20 21:46:08 (UTC+8)
Relation:	SPIE 5715
DOI:	10.1117/12.592034
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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