Fabrication of Aspheric Micro Lens Array by Slow Tool Servo

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/65306

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题名:	Fabrication of Aspheric Micro Lens Array by Slow Tool Servo
作者:	Chen, Chun Chieh;Chao, Choung Lii;Hsu, Wei Yao;Chen, Fong Chi;Chao, Chung Woei
贡献者:	淡江大學機械與機電工程學系
关键词:	Aspheric lens;Aspheric micro lens;Diamond turning;Filling factor;Form accuracy;Micro-lens arrays;Opto-electronics;Slow tool servos;Toolpaths;Ultra precision;Abrasives;Aspherics;Diamonds;Microlenses;Optical instrument lenses;Surface roughness;Turning
日期:	2009-06
上传时间:	2013-05-30 15:25:47 (UTC+8)
出版者:	Stafa-Zurich: Trans tech publications
摘要:	Owing to the fast development in photonic, telecommunication, and opto-electronic industries, the demand for various micro-lens arrays is rapidly growing. The slow tool servo technique was applied on an ultra-precision diamond turning machine in the present research in conjunction with the tool path generating algorithm for aspheric micro-lens array fabrication. An aspheric lens array of 100% filling factor was successfully produced and the form accuracy and surface roughness were better than 0.15μm and 3nm for all the obtained lenses.
關聯:	Advanced Materials Research 76-78, pp.479-484
DOI:	10.4028/www.scientific.net/AMR.76-78.479
显示于类别:	[機械與機電工程學系暨研究所] 期刊論文

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