Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip

doi:10.3390/s100301753

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/65287

請使用永久網址來引用或連結此文件: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/65287

題名:	Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip
作者:	Dai, Ching-liang;Chen, Yen-chi;Wu, Chyan-chyi;Kuo, Chin-fu
貢獻者:	淡江大學機械與機電工程學系
關鍵詞:	micro carbon monoxide sensor;cobalt oxide film;readout circuit
日期:	2010-04
上傳時間:	2011-10-20 21:37:19 (UTC+8)
出版者:	Basel: MDPI AG
摘要:	The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively.
關聯:	Sensors 10(3), pp.1753-1764
DOI:	10.3390/s100301753
顯示於類別:	[機械與機電工程學系暨研究所] 期刊論文

文件中的檔案:

檔案	描述	大小	格式	瀏覽次數
1424-8220_10(3)p1753-1764.pdf		615Kb	Adobe PDF	232	檢視/開啟
index.html		0Kb	HTML	25	檢視/開啟

在機構典藏中所有的資料項目都受到原著作權保護.

TAIR相關文章

資料載入中.....