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    题名: Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip
    作者: Dai, Ching-liang;Chen, Yen-chi;Wu, Chyan-chyi;Kuo, Chin-fu
    贡献者: 淡江大學機械與機電工程學系
    关键词: micro carbon monoxide sensor;cobalt oxide film;readout circuit
    日期: 2010-04
    上传时间: 2011-10-20 21:37:19 (UTC+8)
    出版者: Basel: MDPI AG
    摘要: The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively.
    關聯: Sensors 10(3), pp.1753-1764
    DOI: 10.3390/s100301753
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文

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