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    题名: A wide‐g range silicon piezoresistive accelerometer
    其它题名: 具寬g範圍的矽壓阻式加速度計
    作者: 許郁文;呂學士;楊龍杰;張培仁;Hsu, Yu‐Wen;Lu, Shey‐Shi;Yang, Lung‐Jieh;Chang, Pei‐Zen
    贡献者: 淡江大學機械與機電工程學系
    关键词: piezoresistivity;accelerometer
    日期: 1995-12
    上传时间: 2013-07-11 11:53:53 (UTC+8)
    出版者: Taipei : Chinese Institute of Chemical Engineers
    摘要: In this paper, a high‐performance silicon piezoresistive accelerometer, fabricated by bulk micromachining with an almost linear I/O (acceleration / voltage) relationship from 0 to 90g over a 400Hz bandwidth suitable for vehicle's safety system, is described. This accelerometer is composed of two glass cover caps and a Si sensing structure. The size of the sensing structure is 3.3mm × 2.05 mm × 0.15 mm. It consisted of a “mass”, a “frame”, and 4 thin beam “bridges”. The sensitivity of the accelerometer was found to be 9.6 × 10‐8 (sec2/m) and a gauge factor of 18 was deduced from this value.
    關聯: Journal of the Chinese Institute of Engineers=中國工程學刊 18(6), pp.873-878
    DOI: 10.1080/02533839.1995.9677755
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文

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