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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65272


    Title: A wide‐g range silicon piezoresistive accelerometer
    Other Titles: 具寬g範圍的矽壓阻式加速度計
    Authors: 許郁文;呂學士;楊龍杰;張培仁;Hsu, Yu‐Wen;Lu, Shey‐Shi;Yang, Lung‐Jieh;Chang, Pei‐Zen
    Contributors: 淡江大學機械與機電工程學系
    Keywords: piezoresistivity;accelerometer
    Date: 1995-12
    Issue Date: 2013-07-11 11:53:53 (UTC+8)
    Publisher: Taipei : Chinese Institute of Chemical Engineers
    Abstract: In this paper, a high‐performance silicon piezoresistive accelerometer, fabricated by bulk micromachining with an almost linear I/O (acceleration / voltage) relationship from 0 to 90g over a 400Hz bandwidth suitable for vehicle's safety system, is described. This accelerometer is composed of two glass cover caps and a Si sensing structure. The size of the sensing structure is 3.3mm × 2.05 mm × 0.15 mm. It consisted of a “mass”, a “frame”, and 4 thin beam “bridges”. The sensitivity of the accelerometer was found to be 9.6 × 10‐8 (sec2/m) and a gauge factor of 18 was deduced from this value.
    Relation: Journal of the Chinese Institute of Engineers=中國工程學刊 18(6), pp.873-878
    DOI: 10.1080/02533839.1995.9677755
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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