English  |  正體中文  |  简体中文  |  Items with full text/Total items : 58323/91867 (63%)
Visitors : 14043600      Online Users : 82
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65262

    Title: A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique
    Authors: Wu, C.C.
    Contributors: 淡江大學機械與機電工程學系
    Keywords: Humidity sensor;CMOS;Micro-heater;Inverting amplifier circuit
    Date: 2007-04
    Issue Date: 2011-10-20 21:35:20 (UTC+8)
    Abstract: The fabrication of a nanowire WO3 humidity sensor integrated with an inverting amplifier circuit and a micro-heater on a chip using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process have been implemented. The humidity sensor is composed of a sensing resistor and a humidity sensing film. Tungsten trioxide prepared by a sol–gel method is adopted as the humidity sensing film. The fabrication of the humidity sensor requires a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the humidity sensing film is coated over the sensing resistor. The humidity sensor, which is a resistive type, changes the resistance when the sensing film adsorbs or desorbs water vapor. An inverting amplifier circuit is utilized to convert the resistance of the humidity sensor into the voltage output. The micro-heater is utilized to provide a super-ambient working temperature to the humidity sensor, which can avoid the humidity sensor to generate the signal drift. Experimental results show that the sensitivity of the humidity sensor is about 4.5 mV/% RH at 60 °C.
    Relation: Sensors and Actuators B123, pp.896-901
    DOI: 10.1016/j.snb.2006.10.055
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

    Files in This Item:

    File SizeFormat

    All items in 機構典藏 are protected by copyright, with all rights reserved.

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback