A circular microchannel integrated with embedded spiral electrodes using for fluid transportation

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/65257

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题名:	A circular microchannel integrated with embedded spiral electrodes using for fluid transportation
作者:	楊龍杰;Yang, Lung-jieh;Ko, K.-C.;Wang, J.-M.
贡献者:	淡江大學機械與機電工程學系
关键词:	Circular microchannel;Spiral electrodes;Rolling exposure;Electrohydrodynamic (EHD)
日期:	2007-09-12
上传时间:	2011-10-20 21:34:50 (UTC+8)
摘要:	This paper proposes a novel method to fabricate a circular microchannel with embedded spiral electrodes used for fluid transportation by inserting glass capillary as sacrificial mould. Utilizing a rolling exposure technique in the photolithography process, the continuous spiral electrode has been formed on the non-planar surface of a glass capillary successfully. Moreover, using the concept of sacrificial layer, the spiral electrodes are transferred on the inner surface of a SU-8 circular microchannel with a diameter of 350 μm. The fabricated device was regarded as an electrohydrodynamic (EHD) micropump, and has a pumping capacity of 4.5 μl/min herein.
關聯:	Sensors and Actuators A: Physical 139, pp.172-177
DOI:	10.1016/j.sna.2006.10.039
显示于类别:	[機械與機電工程學系暨研究所] 期刊論文

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