Squeeze and Viscous Damping in Micro Electrostatic Comb Drives

doi:10.1016/S0924-4247(03)00295-4

淡江大學機構典藏 > 工學院 > 航空太空工程學系暨研究所 > 期刊論文 > Item 987654321/62414

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題名:	Squeeze and Viscous Damping in Micro Electrostatic Comb Drives
作者:	Chen, Ching-shung;Kuo, W.J.
貢獻者:	淡江大學航空太空工程學系
關鍵詞:	Micro comb drive;Micro comb structure;Squeeze damping;Viscous damping
日期:	2003-10-01
上傳時間:	2011-10-18 20:48:37 (UTC+8)
出版者:	Elsevier
摘要:	Numerical results in this work demonstrate that the flow around an oscillating electrode of a micro electrostatic comb drive is quite different from a Stokes flow. A vortex is observed in the region between the electrode and the substrate. This vortex slows down the fluid velocity and significantly increases the damping. Squeeze damping and viscous damping are important energy dissipation mechanisms in oscillating micro comb drives. The Knudsen number for micro comb drives indicates that the flow is a slip flow. The slip boundary conditions reduce the viscous and squeeze dampings by about 12.2%. Extending the distance between oscillating and fixed electrodes is an effective way to reduce damping. This effect was investigated numerically. Increasing the distance between the electrode and the substrate is another alterative for decreasing the damping. Its effect on damping was also studied numerically. Numerical results show that the numerical procedure proposed in this work is an effective tool in designing micro electrostatic comb drives.
關聯:	Sensors and Actuators, A: Physical 107(2), pp.193-203
DOI:	10.1016/S0924-4247(03)00295-4
顯示於類別:	[航空太空工程學系暨研究所] 期刊論文

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