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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/62414

    Title: Squeeze and Viscous Damping in Micro Electrostatic Comb Drives
    Authors: Chen, Ching-shung;Kuo, W.J.
    Contributors: 淡江大學航空太空工程學系
    Keywords: Micro comb drive;Micro comb structure;Squeeze damping;Viscous damping
    Date: 2003-10-01
    Issue Date: 2011-10-18 20:48:37 (UTC+8)
    Publisher: Elsevier
    Abstract: Numerical results in this work demonstrate that the flow around an oscillating electrode of a micro electrostatic comb drive is quite different from a Stokes flow. A vortex is observed in the region between the electrode and the substrate. This vortex slows down the fluid velocity and significantly increases the damping. Squeeze damping and viscous damping are important energy dissipation mechanisms in oscillating micro comb drives. The Knudsen number for micro comb drives indicates that the flow is a slip flow. The slip boundary conditions reduce the viscous and squeeze dampings by about 12.2%. Extending the distance between oscillating and fixed electrodes is an effective way to reduce damping. This effect was investigated numerically. Increasing the distance between the electrode and the substrate is another alterative for decreasing the damping. Its effect on damping was also studied numerically. Numerical results show that the numerical procedure proposed in this work is an effective tool in designing micro electrostatic comb drives.
    Relation: Sensors and Actuators, A: Physical 107(2), pp.193-203
    DOI: 10.1016/S0924-4247(03)00295-4
    Appears in Collections:[航空太空工程學系暨研究所] 期刊論文

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