English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 55184/89457 (62%)
造访人次 : 10662959      在线人数 : 25
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜寻范围 查询小技巧:
  • 您可在西文检索词汇前后加上"双引号",以获取较精准的检索结果
  • 若欲以作者姓名搜寻,建议至进阶搜寻限定作者字段,可获得较完整数据
  • 进阶搜寻


    jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/62414


    题名: Squeeze and Viscous Damping in Micro Electrostatic Comb Drives
    作者: Chen, Ching-shung;Kuo, W.J.
    贡献者: 淡江大學航空太空工程學系
    关键词: Micro comb drive;Micro comb structure;Squeeze damping;Viscous damping
    日期: 2003-10-01
    上传时间: 2011-10-18 20:48:37 (UTC+8)
    出版者: Elsevier
    摘要: Numerical results in this work demonstrate that the flow around an oscillating electrode of a micro electrostatic comb drive is quite different from a Stokes flow. A vortex is observed in the region between the electrode and the substrate. This vortex slows down the fluid velocity and significantly increases the damping. Squeeze damping and viscous damping are important energy dissipation mechanisms in oscillating micro comb drives. The Knudsen number for micro comb drives indicates that the flow is a slip flow. The slip boundary conditions reduce the viscous and squeeze dampings by about 12.2%. Extending the distance between oscillating and fixed electrodes is an effective way to reduce damping. This effect was investigated numerically. Increasing the distance between the electrode and the substrate is another alterative for decreasing the damping. Its effect on damping was also studied numerically. Numerical results show that the numerical procedure proposed in this work is an effective tool in designing micro electrostatic comb drives.
    關聯: Sensors and Actuators, A: Physical 107(2), pp.193-203
    DOI: 10.1016/S0924-4247(03)00295-4
    显示于类别:[航空太空工程學系暨研究所] 期刊論文

    文件中的档案:

    档案 大小格式浏览次数
    index.html0KbHTML177检视/开启

    在機構典藏中所有的数据项都受到原著作权保护.

    TAIR相关文章

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回馈