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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/60559

    Title: SU-8 buckled-type microvalves switched by surface tension forces
    Authors: Yang, Lung-jieh;Liu, Kuan-chun
    Contributors: 淡江大學機械與機電工程學系
    Date: 2007-01-16
    Issue Date: 2011-10-14 14:39:47 (UTC+8)
    Publisher: N.Y.: IEEE (Institute of Electrical and Electronic Engineers)
    Abstract: This paper presents the design, the fabrication, and the measurement result of a novel buckled-type microvalve. This device comprises of a parylene microtube for liquid transportation and a peacock-like SU-8 capillary microstructure for switching the microvalve without external power source. The maximal spreading angles of the peacock-like structures actuated by water surface tension are experimentally tested as 204deg and 15deg for the cases of not integrating and integrating a parylene microtube, respectively.
    Relation: Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on, pp.105-108
    DOI: 10.1109/NEMS.2007.352238
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Proceeding

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