N.Y.: IEEE (Institute of Electrical and Electronic Engineers)
This paper presents the design, the fabrication, and the measurement result of a novel buckled-type microvalve. This device comprises of a parylene microtube for liquid transportation and a peacock-like SU-8 capillary microstructure for switching the microvalve without external power source. The maximal spreading angles of the peacock-like structures actuated by water surface tension are experimentally tested as 204deg and 15deg for the cases of not integrating and integrating a parylene microtube, respectively.
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on, pp.105-108