On gas-permeation in PDMS

機構典藏 > College of Engineering > Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering > Journal Article > Item 987654321/60550

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Title:	On gas-permeation in PDMS
Authors:	Yang, Lung-Jieh
Contributors:	淡江大學機械與機電工程學系
Date:	2010-10
Issue Date:	2011-10-14 14:18:00 (UTC+8)
Publisher:	Bristol: Institute of Physics Publishing Ltd.
Abstract:	A theoretical model of gas permeation in polydimethylsiloxane (PDMS) is conducted for two prior works involving MEMS sensors and actuators. The issue for modeling a sensor is about using PDMS slabs to replace Pyrex glass as the packaging substrate for bulk-micromachined pressure sensors. The leakage pressure due to gas permeation in PDMS reveals the time-varying behavior of exponential decay. The issue for modeling an actuator is the flow rate in a PDMS-based gas permeation pump. The nonlinear dependence of the flow rate with the diffusion area can be explained by this model. The prediction of this theoretical result is therefore in qualitative agreement with two previous experimental data sets by a conventional curve-fitting technique.
Relation:	Journal of Micromechanics and Microengineering 20(11), 115033(7pages)
DOI:	10.1088/0960-1317/20/11/115033
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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