Fabrication and testing of surface ratchets primed with hydrophobic parylene and hexamethyldisilazane for transporting droplets

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題名:	Fabrication and testing of surface ratchets primed with hydrophobic parylene and hexamethyldisilazane for transporting droplets
作者:	Chung, Yung-Chiang;Hess, Guo-Yuan;Yeh, Fu-Wen;Han, Hsieh-Cheng;Chen, Chien-Yuan;Lee, Ching-Jiun;Sheen, Horn-Jiunn;Yang, Lung-Jieh
貢獻者:	淡江大學機械與機電工程學系
關鍵詞:	plasma;parylene;hydrophobic;hydrophilic;surface ratchets
日期:	2010-02
上傳時間:	2013-03-12 11:24:17 (UTC+8)
出版者:	Bellingham: SPIE - International Society for Optical Engineering
摘要:	We demonstrate a way to transport droplets by an arrowed micropillar array surface with hydrophobic parylene. The lightly hydrophilic parylene surface could be changed to hydrophobic one by treating with fluorine-based plasma (CF4 or SF6). The droplet on this hydrophobic parylene surface with arrowed ratchets could be transported by a speaker, and the average measured velocity was 29mm∕s. Moreover, the authors compared driving performance of the parylene surface ratchets with the ones modified by the hexamethyldisilazane (HMDS) vapor. Both the results of using hydrophobic parylene and HMDS were better than the previous work.
關聯:	Journal of Micro/Nanolithography, MEMS, and MOEMS 9(1), 013035(9pages)
DOI:	10.1117/1.3280261
顯示於類別:	[機械與機電工程學系暨研究所] 期刊論文

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