Gas Permeation in Polydimethylsiloxane in-situ Monitoring by Silicon Pressure Sensors

機構典藏 > College of Engineering > Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering > Journal Article > Item 987654321/60545

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Title:	Gas Permeation in Polydimethylsiloxane in-situ Monitoring by Silicon Pressure Sensors
Authors:	Yang, Lung-Jieh
Contributors:	淡江大學機械與機電工程學系
Keywords:	Carbon Dioxide CO2;Diffusion Coefficient;Gas Leakage;PDMS;Polydimethylsiloxane
Date:	2009
Issue Date:	2011-10-14 13:45:21 (UTC+8)
Publisher:	Stafa-Zurich: Trans Tech Publications Ltd.
Abstract:	This paper proposes a new way to detect the gas-leakage through PDMS. We use PDMS instead of Pyrex #7740 glass to seal the backside V-grooves of silicon pressure sensors. We put the packaged sensor into a pressurized chamber with CO2 at 300 psi. By observing the output voltage of the pressure sensor, the time history for CO2 permeating into the sensor cavity was easily found. In experiments, we use several PDMS membranes with different thickness, from 45 to 2000 μm, to package the pressure sensors and investigate the gas-leakage of PDMS. The gas leaking through PDMS is shown to be governed by diffusion mechanism, and the diffusion coefficients derived from CO2 leaking history is 2.2×10-9m2/sec, matched with the previous work.
Relation:	Advanced Materials Research 74, pp.113-116
DOI:	10.4028/www.scientific.net/AMR.74.113
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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