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    請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/60545

    題名: Gas Permeation in Polydimethylsiloxane in-situ Monitoring by Silicon Pressure Sensors
    作者: Yang, Lung-Jieh
    貢獻者: 淡江大學機械與機電工程學系
    關鍵詞: Carbon Dioxide CO2;Diffusion Coefficient;Gas Leakage;PDMS;Polydimethylsiloxane
    日期: 2009
    上傳時間: 2011-10-14 13:45:21 (UTC+8)
    出版者: Stafa-Zurich: Trans Tech Publications Ltd.
    摘要: This paper proposes a new way to detect the gas-leakage through PDMS. We use PDMS instead of Pyrex #7740 glass to seal the backside V-grooves of silicon pressure sensors. We put the packaged sensor into a pressurized chamber with CO2 at 300 psi. By observing the output voltage of the pressure sensor, the time history for CO2 permeating into the sensor cavity was easily found. In
    experiments, we use several PDMS membranes with different thickness, from 45 to 2000 μm, to package the pressure sensors and investigate the gas-leakage of PDMS. The gas leaking through PDMS is shown to be governed by diffusion mechanism, and the diffusion coefficients derived from CO2 leaking history is 2.2×10-9m2/sec, matched with the previous work.
    關聯: Advanced Materials Research 74, pp.113-116
    DOI: 10.4028/www.scientific.net/AMR.74.113
    顯示於類別:[機械與機電工程學系暨研究所] 期刊論文


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