Origin of platelike granular structure for the ultrananocrystalline diamond films synthesized in H2-containing Ar/CH4 plasma

doi:10.1063/1.3296187

淡江大學機構典藏 > 理學院 > 物理學系暨研究所 > 期刊論文 > Item 987654321/58304

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题名:	Origin of platelike granular structure for the ultrananocrystalline diamond films synthesized in H2-containing Ar/CH4 plasma
作者:	Wang, Chuan-Sheng;Chen, Huang-Chin;Cheng, Hsiu-Fung;Lin, I-Nan
贡献者:	淡江大學物理學系
日期:	2010
上传时间:	2011-09-30 22:01:58 (UTC+8)
出版者:	College Park: American Institute of Physics
摘要:	The modification on microstructure of diamond films due to the incorporation of H2 species into the Ar/CH4 plasma was systematically investigated. While the hydrogen-free plasma produced the ultrananocrystalline diamond films with equiaxed grains (about 5 nm in size), the hydrogen-containing plasma resulted in platelike grains (about 100×300 nm2 in size). The size of the platelike grains increased with the H2 content in the plasma. Transmission electron microscopy and optical emission spectroscopy reveal that only 0.1%H2 incorporated in the Ar/CH4 plasma is sufficient for inducing the formation of platelike grains, suggesting that the platelike grains are formed via the competition between the attachment and the etching of hydrocarbons onto the existing diamond surfaces. In Ar plasma, the diamond grains were always passivated with hydrocarbons and the active carbon species in the plasma can only renucleate to form nanocrystalline diamond grains. Incorporation of H2 species in the plasma leads to partial etching of hydrocarbons adhered onto the diamond grains, such that active carbon species in the plasma can attach to diamond surface anisotropically, resulting in diamond flakes and dendrites geometry.
關聯:	Journal of Applied Physics 107(3), 034304(7pages)
DOI:	10.1063/1.3296187
显示于类别:	[物理學系暨研究所] 期刊論文

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