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    题名: Fabrication method of nanoimprinting mold core
    作者: 林清彬;Lin, Ching-bin;Cheng, Pao-yu;Lin, Hung-yi
    贡献者: 淡江大學機械與機電工程學系
    日期: 2007-07-19
    上传时间: 2011-05-20 15:36:25 (UTC+8)
    摘要: A method for fabricating a nanoimprint mold core is disclosed. The method includes providing a substrate; forming on the substrate an amorphous thin film, which is transformed into a crystalline thin film upon receipt of energy, the crystalline thin film having physical and chemical characteristics different from those of the amorphous thin film; applying the energy onto a predetermined region of the amorphous thin film, to transform the amorphous thin film within the predetermined region into the crystalline thin film; etching the illuminated amorphous film, which has crystalline mark on amorphous film, and at least partially removing the area of remained amorphous thin films; performing an imprinting process on the substrate, which has the etched amorphous thin films formed; and performing a molding releasing process on the substrate, so as to obtain the nanoimprint mold core.
    显示于类别:[機械與機電工程學系暨研究所] 專利

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