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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/53840

    Title: 拋光墊修整器的表面結構的偵測裝置及方法
    Authors: 趙崇禮;陳盈同;宋健民
    Contributors: 淡江大學機械與機電工程學系
    Date: 2010-03-11
    Issue Date: 2011-05-20 15:35:16 (UTC+8)
    Abstract: 一種拋光墊修整器的表面結構的偵測裝置及方法,係使一電源不同極性的兩端分別電性連接一吸附液體的拋光墊及一修整器的最內層導電層,並使一電力感測器分別電性連接該吸附液體的拋光墊及該修整器的各導電層;藉由該電力感測器顯示的電流或電壓的大小,得知該修整器與該吸附液體的拋光墊接觸的絕緣層的複數凸出的尖點的斷裂情況,以即時監測修整器的凸出尖點的損壞狀況。
    Appears in Collections:[機械與機電工程學系暨研究所] 專利

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