Fabricating a hollow optical waveguide for optical communication applications

淡江大學機構典藏 > 工學院 > 化學工程與材料工程學系暨研究所 > 期刊論文 > Item 987654321/53698

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題名:	Fabricating a hollow optical waveguide for optical communication applications
作者:	Lo, Shih-shou;Chen, Chii-chang;Hsu, Shih-chieh;Liu, Cheng-yi
貢獻者:	淡江大學化學工程與材料工程學系
日期:	2006-06-01
上傳時間:	2011-05-20 09:55:51 (UTC+8)
出版者:	Institute of Electrical and Electronics Engineers
摘要:	This work demonstrates a direct amorphous Si low-temperature wafer bonding technique to fabricate a semiconductor hollow waveguide with omni-directional reflectors for use in near infrared applications. The 2% dilute KOH solution was used to bond two ODR Si wafers with an amorphous Si thin film on the top of Si wafers. The resultant bonding interface is very thin, with a thickness that is close to that of the SiO2 layer in the ODR substrate. Hence, the far-field image shows that light is strongly confined in the waveguides. The propagation loss was reduced to 1.0±0.5 db/cm in the TE and TM modes, broadening the development of the semiconductor hollow waveguide with omni-directional reflectors for use in optical communication applications.
關聯:	Journal of Microelectromechanical Systems 15(3), pp.584-587
DOI:	10.1109/JMEMS.2006.876795
顯示於類別:	[化學工程與材料工程學系暨研究所] 期刊論文

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