Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent

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Title:	Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent
Authors:	Lo, Shih-shou;Chiu, Hua-kung;Chen, Chii-chang;Hsu Shih-chieh;Liu, Cheng-yi
Contributors:	淡江大學化學工程與材料工程學系
Date:	2005-12-01
Issue Date:	2011-05-20 09:55:49 (UTC+8)
Publisher:	IEEE Photonics Society
Abstract:	This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO2 layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide.
Relation:	Photonics Technology Letters 17(12), pp.2592-2594
DOI:	10.1109/LPT.2005.859137
Appears in Collections:	[Graduate Institute & Department of Chemical and Materials Engineering] Journal Article

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