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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/53697


    Title: Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent
    Authors: Lo, Shih-shou;Chiu, Hua-kung;Chen, Chii-chang;Hsu Shih-chieh;Liu, Cheng-yi
    Contributors: 淡江大學化學工程與材料工程學系
    Date: 2005-12-01
    Issue Date: 2011-05-20 09:55:49 (UTC+8)
    Publisher: IEEE Photonics Society
    Abstract: This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO2 layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide.
    Relation: Photonics Technology Letters 17(12), pp.2592-2594
    DOI: 10.1109/LPT.2005.859137
    Appears in Collections:[Graduate Institute & Department of Chemical and Materials Engineering] Journal Article

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