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    题名: Fabrication and tolerance reduction of a Si-based pickup module for optical storage
    作者: Lee, Chien-chien;Wang, Chin-ming;Huang, S.K.;Chang, J. Y.;Chi, Gou-chung;Hsu, S. C.;Liu, C. Y.
    贡献者: 淡江大學化學工程與材料工程學系
    关键词: Diffraction;Fabrication;Optical components;Optical storage;Holographic optical elements;Objectives;Microopto electromechanical systems
    日期: 2006-07-01
    上传时间: 2011-05-20 09:54:26 (UTC+8)
    出版者: Society of Photo-optical Instrumentation Engineers
    摘要: We develop a miniaturized optical signal pickup module, with a working wavelength of 650 nm, and an image numerical aperture (NA) of 0.6, comprised of several SiNX optical phase elements on stacked Si substrates, for use in optical storage systems. The optical module, which is optical-on-axis and transmissible in both visible and infrared ranges, is designed to include not only a light source, but also diffractive optical elements (DOEs), which can be made with micro-optoelectromechanical systems (MOEMS) technology. Its optical operation is simulated by ray tracing to optimize the spot size ( ∼ 0.6 μm) focused on the disk by adjusting the tolerance of each element in the alignment. All the Si-based transmission optical elements are fabricated and stacked by self-alignment bonding to reduce the tolerance of the assembled system. We obtain a circular focused spot when the full-width at half maximum (FWHM) of the zero-order beam is 3.1 μm; the diffraction limited spot size on the optical disk is 0.7 μm.
    關聯: Optical Engineering 45(7), 074601
    DOI: 10.1117/1.2219105
    显示于类别:[化學工程與材料工程學系暨研究所] 期刊論文

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