The design, the fabrication, and the testing result of a novel microvalve actuated by surface tension force were described in this work. This device comprises of a parylene microtube for liquid transportation and a peacock-like SU-8 capillary microstructure for switching the microvalve in a buckling deformation way without feeding external electrical power. The maximal spreading angles of the peacock-like structures actuated by water surface tension are experimentally tested as 204 and 15 for the cases of not integrating and integrating a parylene microtube, respectively.
Relation:
淡江理工學刊=Tamkang journal of science and engineering 10(2)，頁141-146
