本研究中吾人將超音波振盪的概念，與無閥門式微幫浦的概念合而為一，以聚二甲基矽氧烷(PDMS)與玻璃材料作為主要結構，製作出一無閥門式微幫浦。組成可分為玻璃微流道(含有漸縮/漸張管之玻璃腔體)、PDMS進出口接管和SU-8微型轉子等部分。為了精簡PDMS接合之層數，本研究在青光光罩玻璃上加工出微流道，故如何將玻璃蝕刻的底切(undercut)現象降至最小，是首要考量。其次完成元件組裝後，以外加超音波上下激振，觀察不同葉片數之SU-8微型轉子誘導運轉之狀況。 此種微幫浦設計有許多優點，結構簡單、生產成本低、具有良好的生物相容性，且驅動時無需複雜控制器。初步發現：28KHz以上的超音波振盪，即可驅動此無閥門式微幫浦中的微型轉子，轉速至少為4.4RPM。 In this research we the concept that the ultra sound flap to concuss, with have no valve door the concept that become weak pump unite as one to gather two A Ji silicon oxygens alkanes(PDMS) and glass material as main structure and manufacture a have no valve door become weak pump.Constituting can be divided into glass tiny flow way(have to gradually shrink/gradually piece the glass chamber of the tube body) and PDMS the import and export connector and miniatures SU-8s turn son''s etc. part of.For simplifying the number of PDMS coalescence, this research only covers glass in the green light up process tiny flow a way, past how slice(undercut) the bottom that the glass eclipse engrave the phenomenon decline to least, is an initial consideration.Up and down arouse to flap by in addition ultra sound after completing a component construction secondly, observe the condition that the miniatures SU-8s of different leaf''s number turn a sub- inducement operation. This kind of tiny pump design contains many advantages, the structure is simple, the production cost is low and have good living creature compatibility, and drive don''t need complicated controller.Initial detection:The 28 khzs above ultra sound flaps to concuss, can immediately drive this to become weak miniature within pump to turn son and turn soon at least to 4.4 RPMs without the valve door.
