繞射元件因表面結構複雜一般在精密加工成形後其表面粗糙度便難以改進。本論文以浮動拋光法為基礎研發非接觸式之精密拋光系統用以改善繞射元件的表面粗糙度，並減少拋光過程中對繞射元件表面結構的形狀精度損失。除研製特殊之拋光系統外亦探討各項拋光參數如工件與拋光具間的間隙、工件與拋光具的相對速度、磨粒的尺寸、拋光具的種類等對於繞射元件的表面粗糙度改善與結構形貌變化之相對關係。根據研究結果顯示，本研究開發之拋光系統能夠成功降低繞射元件之表面粗糙度，且與接觸式拋光方法相較，能夠大幅減少表面結構因拋光造成之形狀精度的損失，為具可行性之繞射元件拋光方法。 Owing to the complex surface profile of diffractive optical elements (DOE), it is extremely difficult to further improve the obtained surface roughness of DOE by polishing without damaging its form accuracy. This research aimed to design and develop a non-contact precision polishing system, based on the float polishing method, to improving the surface finish of DOE and, in the same time, to preserve its form accuracy. Polishing parameters such as relative speed between the workpiece and the polishing molds, abrasive size, polishing gap, different kinds of the polishing molds were correlated to the obtained surface roughness, form accuracy and material removal rate in the present study. The results showed that the system developed in this research demonstrated good surface roughness improve rate on polishing the DOE without surrendering too much form accuracy.
