傳統的加工技術已無法滿足於現況，產業追求「輕薄」、「短小」、 「多樣化」三大要求之產品，因此「超精密加工技術」成為重要關鍵 製造技術之一。使用鑽石刀具作超精密加工作業已被廣泛運用於生產 高精度之精密零件，主要應用於高硬度材料加工作業之中，鑽石刀具 具有堅硬、耐磨耗的特性，但仍會產生磨耗。超精密加工中以刀具影 響加工精度的主因有兩個：(1)刀具定位是否精確(2)刀具輪廓誤差， 因此檢測刀具輪廓與刀具定位以提高加工精度便是一項重要的研究。 本研究重點在於藉由光學式檢測系統之優點，輔以次像素技術提 高精度研發一套機械視覺系統輔助於刀具定位及刀具輪廓檢測。 經以光學顯微鏡驗證，研究中提出方法計算，刀具定位精度達 到±0.2um；刀具輪廓量測誤差由像素大小決定量測誤差、刀面角量測 誤差控制在±0.2°以內符合超精密加工作業之要求。 Diamond cutting tools have been widely used in ultra-precision machining of precision components/molds where superb surface finish and tight form accuracy are the basic requirements. Although diamond has the highest hardness of known materials, it’s only the matter of time the well-defined sharp cutting edge of diamond tool will gradually wear down during the machining process. The wear induced profile error often makes the outcome of machining rather unpredictable. Tool setting and tool shape monitoring are therefore playing critical roles in ensuring high product form accuracy. An effective and precise tool setting/profile monitoring technique are essential in ultra-precision machining operation. In the present study, a non-contact monitoring system together with sub-pixel image processing technique was employed to in-situ monitor tool profile. The results showed that the achievable accuracy of this system strongly depended on the amount of frames, quality of the images and the sub-pixel analysis technique. A tool setting accuracy of ±0.2μm was successfully achieved in this study using the developed system.
