English  |  正體中文  |  简体中文  |  Items with full text/Total items : 52068/87197 (60%)
Visitors : 8905718      Online Users : 302
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/52425

    Title: 微透鏡陣列之超精密加工
    Other Titles: Ultra-precision machining of micro-lens array
    Authors: 陳俊傑;Chen, Chun-chieh
    Contributors: 淡江大學機械與機電工程學系博士班
    趙崇禮;Chao, Choung-lii
    Keywords: 微透鏡陣列;超精密加工;慢刀伺服;Micro-lens array;Ultra-precision machining;Slow tool servo
    Date: 2010
    Issue Date: 2010-09-23 17:39:45 (UTC+8)
    Abstract: 光學及光電產品對於光學元件設計的需求不在僅是一般的球面,對於非球面及自由曲面(非軸對稱)形狀的需求與日遽增,除了形狀的複雜度增加之外,對於其形狀精度的需求也不斷提高,而微透鏡陣列即是一般常見需求量大且不易生產的光學元件之一。微透鏡陣列被廣泛的應用於各式光學元件中,如晶圓級光學、照明光學系統、光纖耦合器、液晶顯示器的增效模組、微型投影機及掃描器CIS模組中的透鏡等。
    Owing to the demand from fast growing optical and opto-electronic industry, optical design has advanced from merely planar/spherical to aspheric and to free-form (non-axial symmetrical) in shapes. On top of the increasing complexity in shape, the requirement for form accuracy is getting higher. Micro-lens array (MLA) is one of the typical examples of these difficult-to-produce optical components which are in great demand. MLA has now been widely used in wafer level optics, lighting system, optical fiber coupling devices, brightness enhancement system of LCD, pico-projector, lens of CIS module scanner and etc. Several processes, namely, thermal reflow process, energy beam processing, ultra-precision machining, LIGA/LIGA-like, have been successfully developed to fabricate MLAs. Amongst those processes, ultra-precision machining is considered to be able to achieve higher form accuracy, better surface roughness, and to offer greater flexibility in material/shape selection.
    Three ultra-precision machining processes namely fast tool servo, slow tool servo and diamond milling, are frequently used to produce MLA. Though slow tool servo has the advantages of no extra attachment and fast setting-up, the complicated three dimensional tool shape compensation and tool-path generation are major reasons for resulting in poor form accuracy, pre-matured tool failure and terrible surface finish. This research aimed to develop a model of three dimensional tool shape compensation for generating 3D tool path in slow tool servo diamond turning of symmetrically arranged MLAs such as those in wafer level optics.
    An aspheric MLA of 100% filling factor with form accuracy (p-v) and surface roughness (Ra) better than 0.2 μm and 5nm respectively was successfully produced in the present study. The uniformity of each micro lens was less than 0.05μm. Apart from turning tests, 1D/2D slow tool servo diamond shaping tests were also investigated in this research. The MLA of scanner with form accuracy of 0.2 μm, Ra of 5nm, uniformity of each micro lens ≤ 0.05 μm and sagittal error ≤ 2 μm was generated by the developed tool generation algorithm and 2D slow tool servo diamond shaping process.
    Appears in Collections:[機械與機電工程學系暨研究所] 學位論文

    Files in This Item:

    File SizeFormat

    All items in 機構典藏 are protected by copyright, with all rights reserved.

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback