Manufacture of a polyaniline nanofiber ammonia sensor integrated with a readout circuit using the CMOS-MEMS technique

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/50529

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題名:	Manufacture of a polyaniline nanofiber ammonia sensor integrated with a readout circuit using the CMOS-MEMS technique
作者:	Liu, Mao-chen;Dai, Ching-liang;Chan, Chih-hua;Wu, Chyan-chyi
貢獻者:	淡江大學機械與機電工程學系
關鍵詞:	Ammonia sensor;CMOS;Polyaniline;readout circuit
日期:	2009-02-01
上傳時間:	2010-08-09 19:21:41 (UTC+8)
出版者:	Basel: Molecular Diversity Preservation International
摘要:	This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sensing film. Polyaniline prepared by a chemical polymerization method was adopted as the ammonia sensing film. The fabrication of the ammonia sensor needs a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the ammonia sensing film is coated on the sensing resistor. The ammonia sensor, which is of resistive type, changes its resistance when the sensing film adsorbs or desorbs ammonia gas. A readout circuit is employed to convert the resistance of the ammonia sensor into the voltage output. Experimental results show that the sensitivity of the ammonia sensor is about 0.88 mV/ppm at room temperature
關聯:	Sensors 9(2), pp.869-880
DOI:	10.3390/s90200869
顯示於類別:	[機械與機電工程學系暨研究所] 期刊論文

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