淡江大學機構典藏:Item 987654321/50529
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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/50529


    Title: Manufacture of a polyaniline nanofiber ammonia sensor integrated with a readout circuit using the CMOS-MEMS technique
    Authors: Liu, Mao-chen;Dai, Ching-liang;Chan, Chih-hua;Wu, Chyan-chyi
    Contributors: 淡江大學機械與機電工程學系
    Keywords: Ammonia sensor;CMOS;Polyaniline;readout circuit
    Date: 2009-02-01
    Issue Date: 2010-08-09 19:21:41 (UTC+8)
    Publisher: Basel: Molecular Diversity Preservation International
    Abstract: This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sensing film. Polyaniline prepared by a chemical polymerization method was adopted as the ammonia sensing film. The fabrication of the ammonia sensor needs a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the ammonia sensing film is coated on the sensing resistor. The ammonia sensor, which is of resistive type, changes its resistance when the sensing film adsorbs or desorbs ammonia gas. A readout circuit is employed to convert the resistance of the ammonia sensor into the voltage output. Experimental results show that the sensitivity of the ammonia sensor is about 0.88 mV/ppm at room temperature
    Relation: Sensors 9(2), pp.869-880
    DOI: 10.3390/s90200869
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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