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    题名: Manufacture of a polyaniline nanofiber ammonia sensor integrated with a readout circuit using the CMOS-MEMS technique
    作者: Liu, Mao-chen;Dai, Ching-liang;Chan, Chih-hua;Wu, Chyan-chyi
    贡献者: 淡江大學機械與機電工程學系
    关键词: Ammonia sensor;CMOS;Polyaniline;readout circuit
    日期: 2009-02-01
    上传时间: 2010-08-09 19:21:41 (UTC+8)
    出版者: Basel: Molecular Diversity Preservation International
    摘要: This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sensing film. Polyaniline prepared by a chemical polymerization method was adopted as the ammonia sensing film. The fabrication of the ammonia sensor needs a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the ammonia sensing film is coated on the sensing resistor. The ammonia sensor, which is of resistive type, changes its resistance when the sensing film adsorbs or desorbs ammonia gas. A readout circuit is employed to convert the resistance of the ammonia sensor into the voltage output. Experimental results show that the sensitivity of the ammonia sensor is about 0.88 mV/ppm at room temperature
    關聯: Sensors 9(2), pp.869-880
    DOI: 10.3390/s90200869
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文

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