淡江大學機構典藏:Item 987654321/46230

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    题名: A novel self-aligned fabrication process for nickel-indiffused lithium niobate ridge optical waveguides
    作者: Chang, Wen-ching;Sue, Chao-yung;Hou, Hung-ching;Chang, Shih-jung;Wei, Pei-kuen
    贡献者: 淡江大學電機工程學系
    日期: 1999-04
    上传时间: 2010-03-26 21:27:39 (UTC+8)
    出版者: Piscataway: Institute of Electrical and Electronics Engineers (IEEE)
    摘要: A novel self-aligned fabrication process for Ni : LiNbO3 ridge waveguides has been proposed. By using the self-aligned trilayered structure composed of Ni/Ti/Si, the fabrication process is significantly simplified, and takes advantage of suppression of the unwanted planar waveguides and high-coupling efficiency to a single-mode fiber as compared to the conventional processes. Detailed investigations into the characteristics of the ridge waveguides have also proved to be informative under different fabrication parameters. Moreover, the novel self-aligned fabrication process was applied to fabricate a ridge waveguide Mach-Zehnder modulator. The measured half-wave voltage and extinction ratio were 20.5 V and 12 dB (@ 1.3 \mum), and were 4.2 V and 8 dB (@0.6328gm).
    關聯: IEEE journal of lightwave technology 17(4), pp.613-620
    DOI: 10.1109/50.754791
    显示于类别:[電機工程學系暨研究所] 期刊論文

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