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機構典藏 > College of Engineering > Graduate Institute & Department of Electrical Engineering > Journal Article > Item 987654321/46230

Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/46230

Title:	A novel self-aligned fabrication process for nickel-indiffused lithium niobate ridge optical waveguides
Authors:	Chang, Wen-ching;Sue, Chao-yung;Hou, Hung-ching;Chang, Shih-jung;Wei, Pei-kuen
Contributors:	淡江大學電機工程學系
Date:	1999-04
Issue Date:	2010-03-26 21:27:39 (UTC+8)
Publisher:	Piscataway: Institute of Electrical and Electronics Engineers (IEEE)
Abstract:	A novel self-aligned fabrication process for Ni : LiNbO3 ridge waveguides has been proposed. By using the self-aligned trilayered structure composed of Ni/Ti/Si, the fabrication process is significantly simplified, and takes advantage of suppression of the unwanted planar waveguides and high-coupling efficiency to a single-mode fiber as compared to the conventional processes. Detailed investigations into the characteristics of the ridge waveguides have also proved to be informative under different fabrication parameters. Moreover, the novel self-aligned fabrication process was applied to fabricate a ridge waveguide Mach-Zehnder modulator. The measured half-wave voltage and extinction ratio were 20.5 V and 12 dB (@ 1.3 \mum), and were 4.2 V and 8 dB (@0.6328gm).
Relation:	IEEE journal of lightwave technology 17(4), pp.613-620
DOI:	10.1109/50.754791
Appears in Collections:	[Graduate Institute & Department of Electrical Engineering] Journal Article

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