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| 題名: | A novel self-aligned fabrication process for nickel-indiffused lithium niobate ridge optical waveguides |
| 作者: | Chang, Wen-ching;Sue, Chao-yung;Hou, Hung-ching;Chang, Shih-jung;Wei, Pei-kuen |
| 貢獻者: | 淡江大學電機工程學系 |
| 日期: | 1999-04 |
| 上傳時間: | 2010-03-26 21:27:39 (UTC+8) |
| 出版者: | Piscataway: Institute of Electrical and Electronics Engineers (IEEE) |
| 摘要: | A novel self-aligned fabrication process for Ni : LiNbO3 ridge waveguides has been proposed. By using the self-aligned trilayered structure composed of Ni/Ti/Si, the fabrication process is significantly simplified, and takes advantage of suppression of the unwanted planar waveguides and high-coupling efficiency to a single-mode fiber as compared to the conventional processes. Detailed investigations into the characteristics of the ridge waveguides have also proved to be informative under different fabrication parameters. Moreover, the novel self-aligned fabrication process was applied to fabricate a ridge waveguide Mach-Zehnder modulator. The measured half-wave voltage and extinction ratio were 20.5 V and 12 dB (@ 1.3 \mum), and were 4.2 V and 8 dB (@0.6328gm). |
| 關聯: | IEEE journal of lightwave technology 17(4), pp.613-620 |
| DOI: | 10.1109/50.754791 |
| 顯示於類別: | [電機工程學系暨研究所] 期刊論文
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