A Study of Viscous Air Damping in Laterally Oscillating Micro Comb Structures

淡江大學機構典藏 > 工學院 > 航空太空工程學系暨研究所 > 期刊論文 > Item 987654321/46004

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题名:	A Study of Viscous Air Damping in Laterally Oscillating Micro Comb Structures
作者:	陳慶祥;Chen, Ching-shung;楊龍杰;Yang, Lung-jieh;Chou, C. F.
贡献者:	淡江大學航空太空工程學系
关键词:	Accelerometer;Micro comb structure;Viscous damping
日期:	2003-03
上传时间:	2013-03-20 16:20:06 (UTC+8)
出版者:	臺南市：中國航空太空學會
摘要:	This paper studies analytically as well as numerically viscous air damping in laterally oscillating micro comb structures. The analytical results demonstrate that the transient motion is damped out in less than one oscillating period of the comb structures studied. The Knudsen numbers in typical micro comb structures indicate part of the flow falling in the slip flow region. The slip effect is also studied. The predicted quality factors subject to the slip and the nonslip boundary conditions are both larger than the experimental data. The possible explanation for this discrepancy is that our solution procedure assumes that the structure is infinite, while an actual structure is finite and three-dimensional. The pumping and sucking motions at the edges of the comb fingers have significant effects on the flow field.
關聯:	中國航空太空學會學刊=Transactions of the Aeronautical and Astronautical Society of the Republic of China 35(1)，頁99-105
显示于类别:	[機械與機電工程學系暨研究所] 期刊論文 [航空太空工程學系暨研究所] 期刊論文

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