A Study of Viscous Air Damping in Laterally Oscillating Micro Comb Structures

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Title:	A Study of Viscous Air Damping in Laterally Oscillating Micro Comb Structures
Authors:	陳慶祥;Chen, Ching-shung;楊龍杰;Yang, Lung-jieh;Chou, C. F.
Contributors:	淡江大學航空太空工程學系
Keywords:	Accelerometer;Micro comb structure;Viscous damping
Date:	2003-03
Issue Date:	2013-03-20 16:20:06 (UTC+8)
Publisher:	臺南市：中國航空太空學會
Abstract:	This paper studies analytically as well as numerically viscous air damping in laterally oscillating micro comb structures. The analytical results demonstrate that the transient motion is damped out in less than one oscillating period of the comb structures studied. The Knudsen numbers in typical micro comb structures indicate part of the flow falling in the slip flow region. The slip effect is also studied. The predicted quality factors subject to the slip and the nonslip boundary conditions are both larger than the experimental data. The possible explanation for this discrepancy is that our solution procedure assumes that the structure is infinite, while an actual structure is finite and three-dimensional. The pumping and sucking motions at the edges of the comb fingers have significant effects on the flow field.
Relation:	中國航空太空學會學刊=Transactions of the Aeronautical and Astronautical Society of the Republic of China 35(1)，頁99-105
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article [Graduate Institute & Department of Aerospace Engineering] Journal Article

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