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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45828

    Title: Phase synchronization of micro-mirror arrays using elastic linkages
    Authors: Yang, Lung-Jieh;Liu, Chih-Wei;Chang, Peizen
    Contributors: 淡江大學機械與機電工程學系
    Keywords: Elasticity;Microelectromechanical devices;Micromachining;Resonance;Synchronization;Vibrations (mechanical);Bulk-micromachining;Elastic linkages;Micro-mirror arrays;Phase synchronization;Mirrors
    Date: 2001-12
    Issue Date: 2013-08-08 14:51:26 (UTC+8)
    Publisher: Lausanne: Elsevier S.A.
    Abstract: This paper investigates phase synchronization and concordant resonance of micro-mirror arrays and describes in detail a proposed design for a segmented micro-mirror with elastic linkages. The device replaces a conventional large area mirror, thus increasing the working frequency and allowing micro-mirror arrays to induce smaller vibration amplitude. The torsional micro-mirror array is fabricated using three conventional masks based on silicon bulk-micromachining technology. Experimental results of the prototype sample show that the phase difference among the mirror segments of the mirror array is below 1/15 cycle.
    Relation: Sensors and Actuators, A: Physical 95(1), pp.55-60
    DOI: 10.1016/S0924-4247(01)00710-5
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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