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    题名: Phase synchronization of micro-mirror arrays using elastic linkages
    作者: Yang, Lung-Jieh;Liu, Chih-Wei;Chang, Peizen
    贡献者: 淡江大學機械與機電工程學系
    关键词: Elasticity;Microelectromechanical devices;Micromachining;Resonance;Synchronization;Vibrations (mechanical);Bulk-micromachining;Elastic linkages;Micro-mirror arrays;Phase synchronization;Mirrors
    日期: 2001-12
    上传时间: 2013-08-08 14:51:26 (UTC+8)
    出版者: Lausanne: Elsevier S.A.
    摘要: This paper investigates phase synchronization and concordant resonance of micro-mirror arrays and describes in detail a proposed design for a segmented micro-mirror with elastic linkages. The device replaces a conventional large area mirror, thus increasing the working frequency and allowing micro-mirror arrays to induce smaller vibration amplitude. The torsional micro-mirror array is fabricated using three conventional masks based on silicon bulk-micromachining technology. Experimental results of the prototype sample show that the phase difference among the mirror segments of the mirror array is below 1/15 cycle.
    關聯: Sensors and Actuators, A: Physical 95(1), pp.55-60
    DOI: 10.1016/S0924-4247(01)00710-5
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文

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