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    請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45826

    題名: Buckled-type valves integrated by parylene micro-tubes
    作者: Yang, Lung-Jieh;Wang, Hsin-Hsiung;Wang, Jiun-Min;Liu, Kuan-Chun;Ko, Kai-Chung
    貢獻者: 淡江大學機械與機電工程學系
    關鍵詞: Buckling;Capillarity;Formability;Molds;Photolithography;Plastic products;Buckled-type valves;Circular microchannels;Parylene;SU-8;Valves (mechanical)
    日期: 2006-08
    上傳時間: 2013-08-08 14:51:05 (UTC+8)
    出版者: Lausanne: Elsevier S.A.
    摘要: This paper demonstrates a newly developed parylene buckled-type valve with the same working principle of the “buckled straw”. Such a new design of the valve uses the buckled region of plastic tubes as the on/off switch for flow control, and there is no need of adding deformable diaphragms or sealing parts into the valve device. By the merit of its concise mechanism, i.e., a straight pipeline with the region for buckling, the buckled-type valve intrinsically operates with almost zero dead volume. The fabrication sequence of this new valve combines the techniques of sacrificial mould of capillary glass tubes, conformal parylene coating and SU-8 photolithography. A valve device of 1 cm long, 0.8 cm wide and with the buckled micro-tube of 390 μm outer-diameter is demonstrated. The turn-on (flow-closing) angle of this valve verified as 120° experimentally.
    關聯: Sensors and Actuators, A: Physical 130-131(SPEC. ISS.), pp.241-246
    DOI: 10.1016/j.sna.2006.01.046
    顯示於類別:[機械與機電工程學系暨研究所] 期刊論文


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