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    請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45807

    題名: Fabrication of SU-8 embedded microchannels with circular cross-section
    作者: Yang, Lung-jieh;Chen, Yu-tang;Kang, Shung-wen;Wang, Yi-chung
    貢獻者: 淡江大學機械與機電工程學系
    關鍵詞: SU-8 microchannels;Optical-fibers;Surface roughness;Roundness deviations;Wetting behaviors;Etching rate
    日期: 2004-08-01
    上傳時間: 2010-03-26 19:59:27 (UTC+8)
    出版者: Elsevier
    摘要: This paper proposes a novel technique for fabricating microchannels in SU-8 by inserting optical-fibers as sacrificial moulds. The embedded circular microchannels, with inner diameters of 36, 80, and 125 μm (i.e., the diameters of optical-fibers), have been made successfully using a low-temperature fabrication process; where the SU-8 transparent negative-bone photo-resist is selected as the structure layer built in multilayers. Additionally, low-cost ultraviolet is applied as the exposure source to pattern the thin film photo-resist. Preliminary results show that the microchannels fabricated with the proposed technique have an average surface roughness (Ra) of the inner wall less than 10 nm and roundness deviation less than 7%. This paper also discusses the wetting behavior of the SU-8 surfaces before and after dipping in the hydrofluoric acid, and summarizes the relationship between the etching rate of sacrificial optical-fibers, etching temperature, concentration, and channel size. Finally, the etching rate of sacrificial optical-fibers vs. etching temperature subject to different concentrations and channel sizes is summarized and explained. This new fabrication technique of microchannel manufacture provides a new approach in selecting SU-8 for the structure material containing microchannels.
    關聯: International journal of machine tools and manufacture 44(10), pp.1109-1114
    DOI: 10.1016/j.ijmachtools.2004.02.021
    顯示於類別:[機械與機電工程學系暨研究所] 期刊論文


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