English  |  正體中文  |  简体中文  |  全文筆數/總筆數 : 56379/90243 (62%)
造訪人次 : 11687711      線上人數 : 40
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜尋範圍 查詢小技巧:
  • 您可在西文檢索詞彙前後加上"雙引號",以獲取較精準的檢索結果
  • 若欲以作者姓名搜尋,建議至進階搜尋限定作者欄位,可獲得較完整資料
  • 進階搜尋
    請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45807


    題名: Fabrication of SU-8 embedded microchannels with circular cross-section
    作者: Yang, Lung-jieh;Chen, Yu-tang;Kang, Shung-wen;Wang, Yi-chung
    貢獻者: 淡江大學機械與機電工程學系
    關鍵詞: SU-8 microchannels;Optical-fibers;Surface roughness;Roundness deviations;Wetting behaviors;Etching rate
    日期: 2004-08-01
    上傳時間: 2010-03-26 19:59:27 (UTC+8)
    出版者: Elsevier
    摘要: This paper proposes a novel technique for fabricating microchannels in SU-8 by inserting optical-fibers as sacrificial moulds. The embedded circular microchannels, with inner diameters of 36, 80, and 125 μm (i.e., the diameters of optical-fibers), have been made successfully using a low-temperature fabrication process; where the SU-8 transparent negative-bone photo-resist is selected as the structure layer built in multilayers. Additionally, low-cost ultraviolet is applied as the exposure source to pattern the thin film photo-resist. Preliminary results show that the microchannels fabricated with the proposed technique have an average surface roughness (Ra) of the inner wall less than 10 nm and roundness deviation less than 7%. This paper also discusses the wetting behavior of the SU-8 surfaces before and after dipping in the hydrofluoric acid, and summarizes the relationship between the etching rate of sacrificial optical-fibers, etching temperature, concentration, and channel size. Finally, the etching rate of sacrificial optical-fibers vs. etching temperature subject to different concentrations and channel sizes is summarized and explained. This new fabrication technique of microchannel manufacture provides a new approach in selecting SU-8 for the structure material containing microchannels.
    關聯: International journal of machine tools and manufacture 44(10), pp.1109-1114
    DOI: 10.1016/j.ijmachtools.2004.02.021
    顯示於類別:[機械與機電工程學系暨研究所] 期刊論文

    文件中的檔案:

    檔案 大小格式瀏覽次數
    0KbUnknown408檢視/開啟

    在機構典藏中所有的資料項目都受到原著作權保護.

    TAIR相關文章

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回饋