English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 62805/95882 (66%)
造访人次 : 3855365      在线人数 : 115
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜寻范围 查询小技巧:
  • 您可在西文检索词汇前后加上"双引号",以获取较精准的检索结果
  • 若欲以作者姓名搜寻,建议至进阶搜寻限定作者字段,可获得较完整数据
  • 进阶搜寻


    jsp.display-item.identifier=請使用永久網址來引用或連結此文件: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/45807


    题名: Fabrication of SU-8 embedded microchannels with circular cross-section
    作者: Yang, Lung-jieh;Chen, Yu-tang;Kang, Shung-wen;Wang, Yi-chung
    贡献者: 淡江大學機械與機電工程學系
    关键词: SU-8 microchannels;Optical-fibers;Surface roughness;Roundness deviations;Wetting behaviors;Etching rate
    日期: 2004-08-01
    上传时间: 2010-03-26 19:59:27 (UTC+8)
    出版者: Elsevier
    摘要: This paper proposes a novel technique for fabricating microchannels in SU-8 by inserting optical-fibers as sacrificial moulds. The embedded circular microchannels, with inner diameters of 36, 80, and 125 μm (i.e., the diameters of optical-fibers), have been made successfully using a low-temperature fabrication process; where the SU-8 transparent negative-bone photo-resist is selected as the structure layer built in multilayers. Additionally, low-cost ultraviolet is applied as the exposure source to pattern the thin film photo-resist. Preliminary results show that the microchannels fabricated with the proposed technique have an average surface roughness (Ra) of the inner wall less than 10 nm and roundness deviation less than 7%. This paper also discusses the wetting behavior of the SU-8 surfaces before and after dipping in the hydrofluoric acid, and summarizes the relationship between the etching rate of sacrificial optical-fibers, etching temperature, concentration, and channel size. Finally, the etching rate of sacrificial optical-fibers vs. etching temperature subject to different concentrations and channel sizes is summarized and explained. This new fabrication technique of microchannel manufacture provides a new approach in selecting SU-8 for the structure material containing microchannels.
    關聯: International journal of machine tools and manufacture 44(10), pp.1109-1114
    DOI: 10.1016/j.ijmachtools.2004.02.021
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文

    文件中的档案:

    档案 描述 大小格式浏览次数
    0KbUnknown558检视/开启
    Fabrication of SU-8 embedded microchannels with circular cross-section.pdf630KbAdobe PDF1检视/开启

    在機構典藏中所有的数据项都受到原著作权保护.

    TAIR相关文章

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回馈