The Zeroth Order Solution of the Velocity Field around Micro Comb Structures with Lateral Oscillation

doi:10.1080/02533839.2002.9670680

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/45787

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題名:	The Zeroth Order Solution of the Velocity Field around Micro Comb Structures with Lateral Oscillation
其他題名:	半導體微型加速度計梳狀結構之流場阻尼分析
作者:	李其源;Lee, Chi-yuan;楊龍杰;Yang, Lung-jieh;陳炳煇;Chen, Ping-hei
貢獻者:	淡江大學機械與機電工程學系
關鍵詞:	阻尼比;微梳狀結構;微機電系統 Damping ratio;Micro comb structure;Micro-electro-mechanical systems;MEMS
日期:	2002-01
上傳時間:	2013-07-11 11:53:19 (UTC+8)
出版者:	Taipei : Chinese Institute of Chemical Engineers
摘要:	This work models the flow around the comb structure of a surface‐ machined microaccelerometer as a two‐dimensional, time‐periodic, incompressible flow with periodic boundary conditions. The corresponding two‐dimensional Navier‐Stokes equation generally has no analytical solution. However, using small‐size scaling, the dominant diffusion mechanism of the micro flow pattern simplifies the governing equations into one set of diffusion equations. Moreover, this investigation presents an analytical approximation combined with the method of separating variables in a complex‐variable domain, to solve the two‐dimensional diffusion equation of the velocity field. The precise analysis of air damping herein could predict the frequency response of the micro comb structures dynamic behavior.
關聯:	Journal of the Chinese Institute of Engineers=中國工程學刊 25(1), pp.57-65
DOI:	10.1080/02533839.2002.9670680
顯示於類別:	[機械與機電工程學系暨研究所] 期刊論文

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