The Zeroth Order Solution of the Velocity Field around Micro Comb Structures with Lateral Oscillation

doi:10.1080/02533839.2002.9670680

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/45787

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/45787

题名:	The Zeroth Order Solution of the Velocity Field around Micro Comb Structures with Lateral Oscillation
其它题名:	半導體微型加速度計梳狀結構之流場阻尼分析
作者:	李其源;Lee, Chi-yuan;楊龍杰;Yang, Lung-jieh;陳炳煇;Chen, Ping-hei
贡献者:	淡江大學機械與機電工程學系
关键词:	阻尼比;微梳狀結構;微機電系統 Damping ratio;Micro comb structure;Micro-electro-mechanical systems;MEMS
日期:	2002-01
上传时间:	2013-07-11 11:53:19 (UTC+8)
出版者:	Taipei : Chinese Institute of Chemical Engineers
摘要:	This work models the flow around the comb structure of a surface‐ machined microaccelerometer as a two‐dimensional, time‐periodic, incompressible flow with periodic boundary conditions. The corresponding two‐dimensional Navier‐Stokes equation generally has no analytical solution. However, using small‐size scaling, the dominant diffusion mechanism of the micro flow pattern simplifies the governing equations into one set of diffusion equations. Moreover, this investigation presents an analytical approximation combined with the method of separating variables in a complex‐variable domain, to solve the two‐dimensional diffusion equation of the velocity field. The precise analysis of air damping herein could predict the frequency response of the micro comb structures dynamic behavior.
關聯:	Journal of the Chinese Institute of Engineers=中國工程學刊 25(1), pp.57-65
DOI:	10.1080/02533839.2002.9670680
显示于类别:	[機械與機電工程學系暨研究所] 期刊論文

文件中的档案:

档案	大小	格式	浏览次数
index.html	0Kb	HTML	49	检视/开启

在機構典藏中所有的数据项都受到原著作权保护.

TAIR相关文章

数据加载中.....