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    Title: The Zeroth Order Solution of the Velocity Field around Micro Comb Structures with Lateral Oscillation
    Other Titles: 半導體微型加速度計梳狀結構之流場阻尼分析
    Authors: 李其源;Lee, Chi-yuan;楊龍杰;Yang, Lung-jieh;陳炳煇;Chen, Ping-hei
    Contributors: 淡江大學機械與機電工程學系
    Keywords: 阻尼比;微梳狀結構;微機電系統 Damping ratio;Micro comb structure;Micro-electro-mechanical systems;MEMS
    Date: 2002-01
    Issue Date: 2013-07-11 11:53:19 (UTC+8)
    Publisher: Taipei : Chinese Institute of Chemical Engineers
    Abstract: This work models the flow around the comb structure of a surface‐ machined microaccelerometer as a two‐dimensional, time‐periodic, incompressible flow with periodic boundary conditions. The corresponding two‐dimensional Navier‐Stokes equation generally has no analytical solution. However, using small‐size scaling, the dominant diffusion mechanism of the micro flow pattern simplifies the governing equations into one set of diffusion equations. Moreover, this investigation presents an analytical approximation combined with the method of separating variables in a complex‐variable domain, to solve the two‐dimensional diffusion equation of the velocity field. The precise analysis of air damping herein could predict the frequency response of the micro comb structures dynamic behavior.
    Relation: Journal of the Chinese Institute of Engineers=中國工程學刊 25(1), pp.57-65
    DOI: 10.1080/02533839.2002.9670680
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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