Fabrication of 3-D micro-coils with ferro-magnetic cores using a standard CMOS process

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/45733

Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/45733

Title:	Fabrication of 3-D micro-coils with ferro-magnetic cores using a standard CMOS process
Authors:	楊龍杰;Yang, Lung-jieh;Hsieh, K. Y.;Chiou, J. H.;Chen, J. Y.;Chang, C. L.;Chang, P. Z.
Contributors:	淡江大學機械與機電工程學系
Date:	1999-10
Issue Date:	2010-03-26 19:50:28 (UTC+8)
Publisher:	Scientific Publishing Division Myu
Relation:	Sensors and materials 11(6), pp.359-367
Appears in Collections:	[機械與機電工程學系暨研究所] 期刊論文

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