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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45724

    Title: A liquid-based gravity-driven etching-stop technique and its application to wafer level cantilever thickness control of AFM probes
    Authors: Lin, Wei-chih;Yang, Lung-jieh
    Contributors: 淡江大學機械與機電工程學系
    Keywords: Cantilever thickness control;Probe chips;Trenches;Wafer level;Wet etching;Atomic force microscopy;Cantilever beams;Gravitation;Methane;Probes;Silicon wafers;Thickness control;Etching
    Date: 2005-05
    Issue Date: 2013-03-12 11:23:54 (UTC+8)
    Publisher: Bristol: Institute of Physics Publishing Ltd.
    Relation: Journal of Micromechanics and Microengineering 15(5), pp.1049-1054
    DOI: 10.1088/0960-1317/15/5/022
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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