淡江大學機構典藏:Item 987654321/45699
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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/45699


    Title: 固態加速度計簡介
    Authors: 張培仁;呂學士;劉深淵;楊龍杰
    Contributors: 淡江大學機械與機電工程學系
    Date: 1996-04
    Issue Date: 2010-03-26 19:46:20 (UTC+8)
    Publisher: 機械月刊雜誌社
    Abstract: 所謂「固態加速度計」,舉凡以非傳統機械加工技術製作,尺寸在數毫米之內,而運作機制已超越機械專業範疇者皆是。因其尺寸遠小於傳統加速度計,或稱之「微型加速度計」。另因以矽晶圓製作該微型加速度計為時下大宗主流,故又稱「半導體加速度計」。在微機電系統之數種主要感測器中,固態加速度計以其與機械、力學之深厚淵源,成為許多機械專長背景人士加入微機電領域之頭一項研究課題。有鑑於固態感測器之微細加工技術大同小異,本文將偏重於介紹加速度計之運作原理與設計要旨,兼述國內在此方面可能之發展利機。
    Relation: 電子月刊2(4)=9,頁59-62
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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