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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45698


    Title: 半導體微型感測器與非破壞性檢測
    Authors: 楊龍杰;張培仁
    Contributors: 淡江大學機械與機電工程學系
    Date: 1997-07
    Issue Date: 2010-03-26 19:46:15 (UTC+8)
    Publisher: 機械月刊雜誌社
    Abstract: 小而美的微機電系統(Micro-Electro-Mechanical Systems)技術,近年來已廣受注目。其技術略分為感測器(sensor)與制動器(actuator)二大部分,而感測器之發展又早於制動器。事實上,在1980年代後期提出微機電系統、或微系統技術(Micro-System Technology) 等名稱之前,許多半導體感測器與微細加工之先期研究,均集中列入微電子的範疇; 此可由其文獻之出處面見一斑。本文即基於尋求跨技術互動與應用之動機,以半導體微型加速度計之製作為肇始,發現其可應用於非破壞性檢測之暫態彈性波法,使檢測之結果更為直接與準確。最後並回過頭來以非破壞性檢測之超音波法,監控矽質薄膜之厚度,提供體型微細加工另一種增益精度的途徑。
    Relation: 電子月刊3(7)=24,頁145-151
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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